Prof. Shengzhou Huang | Computational Lithography | Research Excellence Award
Anhui Polytechnic University | China
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Featured Publications
High-fidelity digital lithography method via adaptive curvature segmentation and region-specific fitting for complex patterns
– Optics and Laser Technology, 2026
Dynamic diversity-driven hierarchical particle swarm optimization method for edge distortion compensation in digital lithography mask optimization
– Optics and Lasers in Engineering, 2026
Chaos-enhanced self-adaptive particle swarm optimization with simulated annealing for digital lithography mask optimization
– Journal of Vacuum Science & Technology B, 2025
Efficient mask optimization for enhanced digital lithography quality by improved particle swarm optimization algorithm
– Journal of Vacuum Science & Technology B, 2024